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基于硼的卤化物(BF_3)能与乙腈(CH_3CN)形成稳定的络合物,将试样置于铂金坩埚内加入乙晴作为络合剂,用HF+HNO_3(3:1)在压力溶样器内加温溶解。然后低温蒸发基体硅,杂质溶液转移到平头石墨电极上,交流电弧激发光谱分析。
The boron-based halide (BF_3) forms a stable complex with acetonitrile (CH_3CN). The sample was placed in a platinum crucible and acetonitrile was added as the complexing agent. The sample was dissolved with HF + HNO_3 Warmer dissolved. Then the substrate silicon is evaporated at low temperature, the impurity solution is transferred to the flat graphite electrode, and the AC arc excitation spectrum is analyzed.