在近场光存储方案中,头盘间距动态测控技术是近场光存储理论和技术的实用化。根据近场光学头的飞行特点,提出了一种基于光强干涉原理的测量系统,重点介绍了其测量原理和标定方法。采用双光路结构来提高测量分辨率,利用光偏振特性来消除反馈光对信号光的干扰。通过对系统性能的分析和试验表明,动态特性达到了500kHz,测量分辨率高于1nm,可满足系统高精度动态测试的要求。 In the near-field optical storage scheme, the dynamic measurement and control technology of the head disk pitch is the practical application of near field optical storage theory and technology. According to the flight characteristics of the near-field optical head, a measurement system based on the principle of light intensity interference is proposed, and the measurement principle and calibration method are mainly introduced. Dual optical path structure to improve the measurement resolution, the use of light polarization to eliminate feedback signal light interference. Through the analysis and test of the system performance, it shows that the dynamic characteristics reach 500kHz and the measurement resolution is higher than 1nm, which can meet the requirement of high precision dynamic test of the system.