早在1968年,英国剑桥大学便开始扫描电子显微镜频闪技术的研究。但频闪技术的应用研究则是新近发展起来的。由于这种技术可用来检测大规模集成电路,分析半导体材料的一些物理性能,故这种技术受到各国的重视。但初期仅停留在实验研究阶段,一直到1984年才开始安装在商品生产的扫描电子显微镜上。这种扫描电子显微镜称为频闪扫描电子显微镜。目前,国内尚未引进这种仪器。近几年来,我们在国产DX—3型扫描电子显微镜上开展了频闪技术的研究,自行 As early as 1968, the University of Cambridge began scanning electron microscopy stroboscopic techniques. However, the application of strobe technology is newly developed. Because of this technology can be used to detect large-scale integrated circuits, semiconductor materials to analyze some of the physical properties, so this technology by all countries attention. But in the early days only stayed in the experimental research stage until 1984, began to be installed on the production of scanning electron microscopy. This scanning electron microscope is called stroboscopic scanning electron microscope. At present, this kind of instrument has not been introduced in China. In recent years, we conducted a stroboscopic technology on the domestic DX-3 scanning electron microscope, on their own