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本文从硅晶体的结构说明V型槽形成的机理,该槽具有结晶学的平直、光滑、定位可控制在光刻精度的优点,经合理的方法较成功地实现了V型槽的制备,为光纤-波导的耦合提供较理想、稳定、低耗的器件。
In this paper, the formation mechanism of V-shaped groove is described from the structure of silicon crystal. The groove has the advantages of flatness and smoothness in crystallography and controllable positioning in lithography precision. The preparation of V- Provide ideal, stable and low-loss device for fiber-waveguide coupling.