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针对二维微定位平台普遍具有体积大、行程小的问题, 提出一种串级菱形位移放大机构, 设计了嵌套式压电驱动二维微定位平台.根据平台运动原理建立了平台的力学模型并进行放大比分析;对平台进行静态特性分析, 研究平台所受驱动力与输出位移的关系并进行理论与仿真对比, 测试平台的输出位移特性;对平台进行动态特性分析, 建立平台的动力学模型, 研究平台闭环阶跃响应进行仿真与实验对比;对平台进行闭环最小位移分辨率、重复定位精度和平台运动偏转误差分析.实验结果表明, 该压电驱动串级菱形位移放大微定位平台具有大行程、体积小、精度高的特点.“,”Aiming at the problems of large size and small stroke of two-dimensional micro positioning platform, a nested two-dimensional piezo-driven micro positioning platform adopting cascaded rhombus displacement magnifying mechanism is designed. The structure and working principle of the micro positioning platform is introduced. The mechanical model of the micro positioning platform is established, and the effects of its structure parameters on the amplification ratio are investigated. The static characteristics analysis of the micro positioning platform with cascaded rhombus displacement magnifying mechanism is carried out. The relationships between the driving force and output displacement of the micro positioning platform are investigated, and the comparisons between theoretical results and simulation results are made. The output displacement characteristics of the micro positioning platform are tested. The dynamic characteristic analysis of the micro positioning platform is carried out, and the dynamic model of the micro positioning platform is established. The closed-loop step response of micro positioning platform is studied, and the comparisons between simulation results and testing results are made. The closed-loop minimum displacement resolution and the repetitive positioning accuracy of the micro positioning platform are analyzed by testing, and the offset error of the micro positioning platform in two directions is analyzed. The experimental results show that the piezo-driven micro positioning platform with cascaded rhombus displacement magnifying mechanism has the characteristics of large stroke, small volume and high precision.