高真空系统充排气台是电真空器件制备和研制气体激光管的重要工艺设备,其真空系统的动态真空要达到 2 X 10-5托以上,并要求 2 X 10-5托静态真空维持时间越长越好,最低要求要保证有足够的充气时间.但是,目前研制气体激光管充排气台其动态真空比较容易达到10-6托数量级,而静态真 High vacuum system filling and exhausting station is an important process equipment for preparing and developing gas laser tubes for electrical vacuum devices. The dynamic vacuum of the vacuum system needs to reach more than 2 X 10-5 torr and requires 2 X 10-5 torr static vacuum maintenance time The longer the better, the minimum required to ensure adequate inflation time.But the current research and development of gas vacuum tube pumping station its dynamic vacuum is relatively easy to reach 10-6 Torque, while the static