正在受到激光界关注的快放电泵浦型惰性气体单卤化物准分子激光器,是在R.Burnham等于1976年证明快放电泵浦XeF激光作用的启示以后发展起来的。我们研制的这台实验性紫外激光装置是在1978年底完成的。图1示出了它的方框图。泵电路按Blumlein接线,直流高压电源经脉冲形成线产生μ_s量级的脉冲,向泵电路充电至14kV后,起动自触发 The fast-discharge pumping type inert gas monohalide excimer laser, which is receiving the laser attention, was developed after the revelation of R. Burnham et al. (1976) that the fast discharge-pumped XeF laser was activated. The experimental UV laser we developed was completed by the end of 1978. Figure 1 shows its block diagram. Pump circuit according to Blumlein wiring, DC high-voltage power pulse generated by the formation of μ_s pulse level, the pump circuit is charged to 14kV, the starting self-trigger