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长期来,人们一直在改进金属镜面的物理及光学性能,来实现光学玻璃所能达到的面形精度、稳定性和表面光洁度(表面光洁度的均方误差为15～80埃)。用作金属镜面的材料(从红外、可见光到紫外波段)主要有:铜,铝,铍,钛,钼,不锈钢,钽,钨,铼,铱等。然而由于大多数金属的多晶结构,以致用常规抛光技术不能达到优质光学镜面所要求的超光滑(表面光洁度σ<<λ)、低散射水平的要求。激光,特别是高、中功率二氧化碳激光器
For a long time, people have been improving the physical and optical properties of metallic mirrors to achieve the surface accuracy, stability and surface finish (surface-roughness mean square error of 15 to 80 angstroms) that optical glass can achieve. Used as a metal mirror material (from infrared, visible light to ultraviolet band) are: copper, aluminum, beryllium, titanium, molybdenum, stainless steel, tantalum, tungsten, rhenium, iridium and so on. However, due to the polycrystalline structure of most metals, the requirements of ultra-smooth (surface smoothness σ << λ), low scattering levels required for good optical mirrors can not be achieved with conventional polishing techniques. Laser, especially high and medium power CO2 lasers