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法国研究人员演示了一种用氮化硅批量制作的微机械支架,将其同时用作光学探针、波导和原子力显微镜(AFM)触头,形成直径50nm的光学连接。继续加以发展,这种结构最终可能用于对光子晶体等纳米结构器件进行光学寻址。由于能同时进行近场和原子力测量,还可能推动显微术的
French researchers demonstrated a micromechanical scaffold made in bulk with silicon nitride that serves as both an optical probe, waveguide and atomic force microscope (AFM) contact to form an optical connection with a diameter of 50 nm. Continuing its development, this structure may ultimately be used to optically address nanostructured devices such as photonic crystals. It is also possible to promote microscopy due to the simultaneous near-field and atomic force measurements