【摘 要】
：
The gas heating mechanism in the pulse-modulated radio-frequency (rf) discharge at atmospheric pressure was investigated with a one-dimensional two-temperature
【机 构】
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School of Physics and Optoelectronic Engineering, Key Laboratory of Materials Modification by Laser,
论文部分内容阅读
The gas heating mechanism in the pulse-modulated radio-frequency (rf) discharge at atmospheric pressure was investigated with a one-dimensional two-temperature fluid model.Firstly,the spatiotemporal profiles of the gas temperature (Tg)in both consistent rf discharge and pulse-modulated rf discharge were compared.The results indicated that Tg decreases considerably with the pulse-modulated power,and the elastic collision mechanism plays a more important role in the gas heating change.Secondly,the influences of the duty cycle on the discharge parameters,especially on the Tg,were studied.It was found that Tg decreases almost linearly with the reduction of the duty cycle,and there exists one ideal value of the duty cycle,by which both the Tg can be adjusted and the glow mode can be sustained.Thirdly,the discharge mode changing from α to γ mode in the pulse-modulated rf discharge was investigated,the spatial distributions of Tg in the two modes show different features and the ion Joule heating is more important during the mode transition.
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