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介绍了一种利用波面干涉仪和精度为0.2″的端齿盘组合测量六面体相邻两面垂直度误差的新方法,建立了基于最小二乘算法的评定垂直度误差分布的数学模型,介绍了测量装置及测量实验步骤。该方法不但测量精度高,而且能够获得两个面之间垂直度误差分布数据,可用于六面体面体形位误差的高精度修形加工。针对精度为2″的标准直角棱镜的测量实验表明该方法测量结果可信,精度优于0.5″。可推广到其他多面体类零件形位误差的高精度测量。
A new method to measure the verticality error of adjacent two faces of a hexahedron by using the wave-front interferometer and the end-tooth disk combination with a precision of 0.2 “is introduced. A mathematical model to evaluate the verticality error distribution based on the least square algorithm is introduced. The measurement Device and measuring experimental procedure.The method not only has high measuring accuracy but also can obtain the verticality error distribution data between the two surfaces and can be used for the high-precision shape modification of the hexahedral face shape error. For a standard right angle prism with a precision of 2 ” The experimental results show that the method is credible and the accuracy is better than 0.5 ", which can be extended to the high accuracy measurement of the shape error of other polyhedron components.