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为了进一步改善二氧化钒(VO2)薄膜的光学特性,基于有效介质近似理论和VO2在不同温度和波长下的折射率和消光系数,建立了研究VO2纳米周期孔洞薄膜光学特性的数学模型。采用磁控溅射和氧化退火方法,先在石英衬底上制备VO2薄膜,再经多孔氧化铝掩膜和离子束刻蚀工艺,制备了VO2纳米孔洞薄膜。结果表明,随着孔隙率的增加,反射率最低点向短波长移动。与在石英衬底上制备的VO2薄膜相比,VO2纳米孔洞薄膜的透过率明显优于VO2薄膜,在红外区域透过率提高了20%,具有较好的热致变色特性和应用潜力。
In order to further improve the optical properties of vanadium dioxide (VO2) thin films, a mathematical model for studying the optical properties of VO2 nanocrystalline films was established based on the effective medium approximation theory and the refractive index and extinction coefficient of VO2 at different temperatures and wavelengths. VO2 films were prepared on quartz substrates by magnetron sputtering and oxidation annealing. VO2 nanoporous films were prepared by porous alumina mask and ion beam etching. The results show that with the increase of porosity, the lowest reflectance shifts to short wavelength. Compared with the VO2 film prepared on quartz substrate, the transmittance of VO2 nanoporous film is obviously better than that of VO2 film, and the transmittance in the infrared region is increased by 20%. It has better thermochromism and application potential.