论文部分内容阅读
椭圆偏振测量术是一种高度灵敏的、非破坏性的原位表征技术,是金属腐蚀与防护研究的一种重要工具.本文基于对椭圆偏振测量原理的简介,结合椭圆偏振仪和数据解析技术的最新进展,综述了椭圆偏振测量术在金属腐蚀与防护领域的应用现状并讨论了椭圆偏振测量术的发展趋势.
Ellipsometry is a highly sensitive and nondestructive in situ characterization technique and is an important tool for the research of metal corrosion and protection.Based on the introduction of the principle of ellipsometry and the combination of ellipsometer and data analysis Reviewed the application of ellipsometry in the field of metal corrosion and protection and discussed the development trend of ellipsometry.