研究了一种基于静电纺丝纳米纤维制备异质结薄膜的方法。采用静电纺丝技术在硅衬底上依次沉积PVP/CuCl2.2H2O和PVP/SnCl4.5H2O纳米纤维,经过氧等离子体刻蚀并高温退火处理后得到了基于多孔纳米纤维的CuO/SnO2异质结薄膜。利用扫描电子显微镜(SEM)和X射线衍射技术(XRD)对纤维的形貌和结晶状态进行了表征。电学特性及气敏特性测试结果表明,该异质结薄膜具有明显的整流特性,在100℃的工作温度下,对H2S气体响应和恢复速度快、检测限低、选择性好。 A method of preparing heterojunction thin films based on electrospinning nanofibers was studied. The PVP / CuCl2.2H2O and PVP / SnCl4.5H2O nanofibers were sequentially deposited on the silicon substrate by electrospinning technique, and the CuO / SnO2 heterojunction based on porous nanofibers was obtained after oxygen plasma etching and high temperature annealing film. The morphology and crystalline state of the fibers were characterized by scanning electron microscopy (SEM) and X-ray diffraction (XRD). Electrical and gas sensitivities test results show that the heterojunction thin film has obvious rectification characteristics. Under the operating temperature of 100 ℃, the response and recovery speed of H2S gas is fast, the detection limit is low and the selectivity is good.