论文部分内容阅读
本文报道了用巴宾特补偿器定量估算凹非球面的面形。在1.0cm一段范围内,最小可检测位相变化为2π×10~(-3)弧度时,灵敏度的理论估算值为0.002λ。
This paper reports the quantitative estimation of the concave aspherical surface shape using the Babbitt compensator. In the 1.0cm range, the minimum detectable phase change of 2π × 10 ~ (-3) radians, the theoretical estimate of the sensitivity of 0.002λ.