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近年来,可穿戴或贴合式的传感器在实时生理监测、特殊环境信号检测等领域的需求日益凸显,柔性传感器成为当前研究的热点.碳纳米管(CNT),由于其独特的电学和力学性能,在新型电子器件的发展中扮演着越来越重要的角色.本文介绍了几类典型的基于碳纳米管的柔性红外传感器和微压力传感器.在柔性红外传感器的研制中,利用碳纳米管与SiO_2的界面以及不同掺杂的CNT形成的p-n结,设计和制备了两种不同类型的高灵敏度柔性红外传感器,实验结果证明界面载流子行为对传感器的响应速度有重要的影响.另一方面,利用碳纳米管的优秀导电性,设计和制备了两种力传感器.通过银纳米颗粒修饰的碳纳米管制备的柔性拉力传感器,兼具高拉伸度和高灵敏度,具有优秀的应变系数.此外,利用碳纳米管和三棱锥的微结构制备了响应灵敏的微压力传感器,具有优秀的响应幅度与响应速度.
In recent years, the demand of wearable or conformal sensors has become increasingly prominent in the field of real-time physiological monitoring and special environmental signal detection, etc. Flexible carbon nanotubes (CNTs), due to their unique electrical and mechanical properties , Plays an increasingly important role in the development of new electronic devices.This paper introduces several typical flexible infrared sensors and micro-pressure sensors based on carbon nanotubes.In the development of flexible infrared sensors, the use of carbon nanotubes and SiO 2 interface and the pn junction formed by different doped CNTs, two different types of highly sensitive flexible infrared sensors were designed and fabricated. The experimental results show that the interfacial carrier behavior has an important influence on the sensor response speed. On the other hand , Two kinds of force sensors were designed and prepared based on the excellent conductivity of carbon nanotubes.The flexible tensile force sensors fabricated by silver nanoparticles modified carbon nanotubes have high tensile strength and high sensitivity with excellent strain coefficient. In addition, the use of carbon nanotubes and pyramid microstructures prepared response-sensitive micro-pressure sensor, with excellent response amplitude and It should speed.