论文部分内容阅读
为了提高单晶炉副室清理器的清理效果和适用范围,研究了一种新型单晶炉副室清理器。结合副室的结构特点,分析了现有清理器存在的问题,阐述了清理机理,提出了一种接触面大、直径可变的设计思路,并设计了伞状单晶炉副室清理器的机械结构。结果表明:设计的清理器具有结构简单、适用性强和清理效果好的特点,具有一定的推广价值。
In order to improve the clean-up effect and scope of the single-chamber furnace auxiliary chamber cleaner, a new type of single-chamber furnace auxiliary chamber cleaner was studied. Combined with the structural characteristics of the auxiliary chamber, the existing problems of the cleaner were analyzed, the cleaning mechanism was expounded, a design idea of large contact surface and variable diameter was put forward, and the design of the umbrella-shaped single crystal chamber auxiliary cleaner Mechanical structure. The results show that the design of the cleaning device has the characteristics of simple structure, strong applicability and good cleaning effect, and has certain promotion value.