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提出了一种非闭合磁路型高能量密度微电磁驱动器的制作方法,即利用MEMS工艺在单位面积硅基体上制作多匝、高深宽比的平面线圈和高厚度的磁芯.通过先面电铸再线电铸的方式,以及动态控制电铸电流密度的方法进行平面线圈的制作;通过改变衬底表面粗糙度和种子层厚度的方法,改善合金镀层与衬底的粘附性能,可以在单位面积的硅片上,制作出厚度更大的磁性合金镀层.初步实验结果表明:该微型电磁驱动器在相同的输入功率下,比同类其他微电磁驱动器,能产生更大的电磁驱动力,具有更高的能量密度.
A method of manufacturing a non-closed magnetic circuit type high energy density microelectromagnetic actuator is proposed, that is, a multi-turn, high aspect ratio planar coil and a high-thickness magnetic core are fabricated on a silicon substrate with a unit area using a MEMS process. Cast re-wire casting method, as well as the method of dynamically controlling the electroforming current density of planar coils; by changing the substrate surface roughness and seed layer thickness of the method to improve the adhesion of the alloy coating and the substrate can be Unit area of the silicon to produce a larger thickness of the magnetic alloy coating.The preliminary experimental results show that: the micro-electromagnetic drive in the same input power, compared to other similar micro-electromagnetic drive, to produce greater electromagnetic drive, with Higher energy density.