SYNTHESIS OF ORGANOMETALLIC PRECURSORS FOR Si/Zr/C/N-BASED CERAMICS

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A new kind of organometallic precursor for Si/Zr/C/N-based ceramics was synthesized from the amine exchange reaction of hexamethylcyclotrisilazane (D3N) and tetrakis(diethylamino)zirconium (Zr[NEt2]4). Pyrolysis was performed under nitrogen at 800℃ in a tube furnace equipped with a temperature program controller. The highest pyrolytic yield was 67.5%.
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