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本文介绍了应用离子注入技术制作光电检测器的实验情况,研究了注入条件对器件光电特性的影响。实验结果表明:采用离子注入法制作的光电检测器其光电特性较好,具有高的电流响应度和良好的均匀性。
In this paper, we introduce the experiment of photodetector fabricated by ion implantation and study the influence of implantation conditions on the photoelectric properties of the device. The experimental results show that the photodetector fabricated by ion implantation method has good photoelectric property, high current responsivity and good uniformity.