论文部分内容阅读
合成了一系列三正丁基膦辅助配体稳定的铜髣β鄄二酮配合物,对合成的配合物用元素分析、红外、核磁共振以及热重和差热等手段进行了表征。筛选出性能优良的配合物为前驱物用化学汽相沉积(CVD)的方法生长出金属铜膜,用SEM和EDX等手段对生长的铜膜进行了表征。
A series of copper imitative β-diketone complexes were synthesized. The complexes were characterized by elemental analysis, IR, 1H NMR and TG-DTA. The Cu (superscript 3 +) ions were selected as the precursors by chemical vapor deposition (CVD). The copper films were characterized by SEM and EDX.