采用非平衡磁控溅射技术在高速钢基体上以C2H2为反应气源制备了含氢类金刚石(DLC)膜。使用激光拉曼光谱仪、X射线光电子能谱仪和原子力显微镜分析和观察了DLC膜的微观结构及表面形貌,结果表明:DLC膜表面由纳米级别的圆形颗粒堆积而成,其结构呈现出DLC的典型Raman光谱特征,薄膜中的碳元素主要以sp2C键、sp3C键和C-O键的形式存在。以GCr15钢球为摩擦配副,在球盘式摩擦磨损试验机上考察了DLC膜在大气干摩擦条件下的摩擦学性能。实验结果发现:在摩擦初始阶段,DLC膜的摩擦系数从实验开始到达峰值的时间随着载荷和速度的增大都是减少的;而在摩擦稳定阶段,DLC膜的平均摩擦系数随着载荷和速度的增大先减小后增大;速度对DLC膜摩擦系数的影响比载荷更加显著。用扫描电子显微镜观察了磨痕形貌并分析了磨损机理:DLC膜的磨损特征主要为以犁沟现象为主的粘着磨损。随着速度的增加,磨痕表面犁沟现象变弱;而随着载荷的增加,磨损表面的犁沟现象变明显。 Hydrogen-containing diamond-like carbon (DLC) films were prepared on C2H2 gas source by using unbalanced magnetron sputtering. The microstructure and surface morphology of DLC films were analyzed and observed by laser Raman spectroscopy, X-ray photoelectron spectroscopy and atomic force microscopy. The results show that the surface of DLC films is formed by the accumulation of nano-sized round particles, The typical Raman spectral features of DLC, the carbon in the film is mainly in the form of sp2C bond, sp3C bond and CO bond. The tribological properties of DLC film under atmospheric dry friction conditions were investigated on a ball-and-disk friction and wear tester with GCr15 steel ball as friction partner. The experimental results show that the friction coefficient of DLC film decreases from the beginning of experiment to the peak value at initial stage of friction, and decreases with the increase of load and velocity. In the friction stabilization phase, the average friction coefficient of DLC film decreases with the increase of load and velocity Of the first increase and then increase; the effect of velocity on the friction coefficient of DLC film is more significant than the load. Scanning electron microscopy was used to observe the morphology of the wear scar and to analyze the wear mechanism. The wear characteristics of the DLC film were mainly sticking wear with furrow phenomenon. With the increase of velocity, the phenomenon of furrow on the surface of the wear scar becomes weaker. With the increase of the load, the furrow phenomenon on the worn surface becomes obvious.