为解决核聚变激光靶球诊断气体充气问题及满足充气微孔良好的堵胶工艺性,基于扫描探针显微镜的金刚石探针为工具,采用接触力扫描方式对靶球充气微孔进行了微加工工艺研究。研究了金刚石针尖扫描方向、扫描速度及扫描接触压力等工艺参数对微孔形成的影响,得到了较准确的锥状孔型,其孔型尺寸与加工精度满足微孔充气及其堵胶工艺性的要求。实验结果表明,利用扫描探针显微镜作为工具并通过加工工艺研究,可以实现靶球充气锥型微孔的精确加工,为靶球高Z气体的注入提供了一种新的实用技术。 In order to solve the problem of gas fusion of nuclear fusion laser target gas and to meet the good plugging technology of gas-filled micropores, a diamond probe based on a scanning probe microscope is used as a tool, and a contact force scanning method is used to micro-process the aeration micropores of the target sphere handicraft Research. The influence of processing parameters such as scanning direction, scanning speed and scanning contact pressure on the formation of micropores was studied, and a more accurate taper hole pattern was obtained. The hole size and machining accuracy satisfied the requirements of microporous aeration and plugging technology Request. The experimental results show that the scanning probe microscope can be used as a tool and the machining process can be used to precisely process the inflated micropore of the target sphere, providing a new practical technique for injecting high Z gas into the target sphere.