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提出了一种利用临界屈曲法在线测量微机械薄膜残余应力的新结构,并采用表面微加工技术制作了两种测试样品.搭建了在线观测实验装置来实时监控释放过程中结构出现的临界屈曲变形模态,由此判断出结构内部的应力状态,同时在测得临界刻蚀深度的情况下,采用有限元方法计算出残余应力大小.借助有限元方法,先研究了多个参数对临界屈曲应力的影响,然后利用这种新结构对薄膜残余应力进行了实际测量,所得结果与微旋转结构的应力测量结果基本吻合.分析及实验表明,新结构在测量薄膜残余应力方面有许多优点,具有较高的实用价值,不仅能满足大量程的应力检测要求,而且只用一个结构就可以同时测量压应力和拉应力,从而极大提高了器件版图空间的利用率.
A new structure of on-line measurement of residual stress of micromachined films by critical buckling method is proposed, and two kinds of test samples are fabricated by surface micromachining technique.The on-line observation experimental device is set up to monitor the critical buckling deformation Mode, the internal stress state of the structure is judged, and the residual stress is calculated by the finite element method when the critical etching depth is measured.By means of finite element method, the influence of several parameters on the critical buckling stress Then the new structure is used to measure the residual stress of the film, and the results are in good agreement with those of the micro-rotating structure.The analysis and experiments show that the new structure has many advantages in measuring the residual stress of the film, High practical value, not only to meet the requirements of a large range of stress testing, and only one structure can simultaneously measure compressive stress and tensile stress, thus greatly increasing the utilization of device layout space.