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针对激光状态方程(Equation of state,EOS)实验对靶的高精度、表面高质量、材料密度达到或接近理论密度的需求以及金刚石切削技术不改变原材料密度、加工精度高、粗糙度小的特点,阐述了单点金刚石切削技术(SPDT)在EOS靶制备中的应用情况,包括铝、铜等金属薄膜零件制备、多种结构整体式台阶靶制备、整体式楔形靶制备以及金刚石切削技术与其他技术结合制备阻抗匹配靶等靶零件。
According to the equation of state (EOS) experiment, the high precision, high surface quality, material density at or near the theoretical density and the fact that the diamond cutting technology does not change the density of the raw material, the machining precision is high and the roughness is small, The application of single point diamond cutting technology (SPDT) in the preparation of EOS targets is described, including the preparation of metal thin film parts such as aluminum and copper, the preparation of a variety of structural monolithic step targets, the preparation of monolithic wedge targets, the diamond cutting technology and other technologies Preparation of impedance matching targets and other target parts.