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本文从实验角度论述了真空镀膜过程中的一种现象:(1)残存薄膜的放气;(2)喷雾现象;(3)动态真空系统中的治污。这些现象与薄膜的蒸镀有的关系,研究它们有助于对薄膜质量的分析。
This paper discusses a phenomenon of vacuum coating process from the experimental point of view: (1) deflation of residual film; (2) spray phenomenon; (3) pollution control in dynamic vacuum system. These phenomena are related to the deposition of thin films, and they are helpful to analyze the quality of thin films.