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探究了基于不同原理(变温X射线衍射法、热分析法和光功率分析法)的相变温度的测量方法,并从测量机理上对测温方式进行了分析,最后讨论了不同测量方法的优劣及影响这些测温方法测量精度的因素.有助于揭示薄膜材料相变过程中物理化学性质的变化,为薄膜器件组装过程中的稳定性和质量可控性提供技术支撑.
薄膜材料相变温度测量方法介绍
【摘 要】
：
探究了基于不同原理(变温X射线衍射法、热分析法和光功率分析法)的相变温度的测量方法,并从测量机理上对测温方式进行了分析,最后讨论了不同测量方法的优劣及影响这些测温方
【机 构】
：
中国计量科学研究院,北京 100029
【出 处】
：
计量科学与技术
【发表日期】
：
2021年1期
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