通过对半导体器件模拟中网格划分原理的分析 ,提出了一种基于标准单元结构的有限元三角网格生成方法 ,进行了面向对象的结构分析和编程实现 ,并成功地集成于半导体器件模拟软件 SMDS系统之中。结果表明 ,这种网格生成方法是行之有效的。 Based on the analysis of the principle of meshing in semiconductor device simulation, a finite element method of triangle mesh generation based on standard cell structure is proposed. Object-oriented structural analysis and programming are carried out. The method is successfully integrated into semiconductor device simulation software SMDS system. The results show that this method of grid generation is effective.