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采用Nd:YAG激光器,在真空环境下,进行高硬镜面塑胶模具钢(HPM75)的微流道沟槽激光铣削试验研究。研究真空环境下铣削机理及真空度对铣削尺寸和表面质量的影响。研制真空调节系统,调节激光铣削区域状态,进行大气环境和真空环境下的对比试验。结果表明,当真空压力在-0.07～-0.5 MPa范围时,排屑量增加1.6%～3.3%。在铣削优化参数下,与大气环境下激光铣削相比,铣削宽度增加,排屑量增加;可以铣出的沟槽宽度和深度分别为0.225和0.058 mm;真空环境减小了背景气压阻力,提高了熔屑排除力,可以铣削出满足微流道沟槽尺寸和精度要求的沟槽,是一种有效的激光铣削加工辅助工艺。
The Nd: YAG laser was used to study the micro-channel groove laser milling of HPM75 with high hardness in a vacuum environment. The effect of milling mechanism and degree of vacuum on milling size and surface quality in a vacuum environment was investigated. Development of vacuum adjustment system, adjusting the state of laser milling area, the atmospheric environment and vacuum environment comparative test. The results show that when the vacuum pressure is in the range of -0.07 ~ -0.5 MPa, the amount of chip removal increases by 1.6% ~ 3.3%. Under milling optimization parameters, the milling width increases and the amount of chip removal increases compared to laser milling in the atmospheric environment; the groove width and depth that can be milled are 0.225 and 0.058 mm, respectively; the vacuum environment reduces the background air resistance and increases The chip removing ability can mow the groove that meets the requirements of the microchannel groove size and precision, which is an effective laser milling auxiliary process.