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利用高分辨电子显微镜观察了（１００）ＧａＡｓ单晶 Ｖｉｃｋｅｒｓ压痕诱发的形变行为结果表明，这种材料在 Ｖｉｃｋｅｒｓ硬度计载荷的作用下产生许多李晶和堆垛层错，导致发生晶格扭曲，最终诱发晶体的非晶转变．孪晶、层错和晶格扭曲很可能是压痕诱发 ＧａＡｓ非晶转变过程中经历的变形阶段．
The deformation behavior induced by (100) GaAs single-crystal Vickers indentation was observed by high-resolution electron microscope. The results show that this material produces many Li Jing and stacking faults under the Vickers hardness load, resulting in lattice distortion, Eventually inducing the amorphous transition of the crystal. Twins, stacking faults and lattice distortions are most likely the stage of deformation experienced during indentation-induced GaAs amorphous transformation.