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相比于传统的1×N对称型多模干涉(Mult-Mode Interference ,MMI)分束器设计,提出了一种新型埋入式弱限制光波导分束器件.它的干涉区及输入输出波导采用倒锥形式,器件尺寸减小,且不均匀性与附加损耗也减小.以1×4的对称型MMI分束器为例,当只对干涉区采用倒锥形结构后,在TE偏振中心波长为1 .55μm时,器件长度减小了500μm,均匀性增加了0.131 dB,而附加损耗仅增加了0 .02 dB,波长响应较传统设计增加了40 nm.在此基础上,又在输入输出臂上也各增加倒锥形结构后,相比于传统设计附加损耗减小了0 .02 dB,均匀性增加了0 .139 dB,器件长度减小了500μm.改进后的器件具有优越的容差性.器件采用掺氟型聚合物材料进行优化设计,通过在合理范围内偏离输出波导位置,使输出光强达到最大值.
Compared with the conventional 1 × N symmetric MMI beamsplitter design, a new type of buried weakly confined optical waveguide beamsplitter is proposed.Its interference region and input-output waveguide In inverted taper form, the size of the device is reduced, and the inhomogeneity and additional loss are reduced.With the symmetric MMI beam splitter of 1 × 4 as an example, when the inverted cone structure is used only for the interference region, When the center wavelength is 1.55μm, the length of the device is reduced by 500μm, the uniformity is increased by 0.131 dB, the additional loss is only increased by 0.02%, and the wavelength response is increased by 40 nm compared with the traditional design. On this basis, Compared with the traditional design, the additional loss is reduced by 0.02 dB, the uniformity is increased by 0.139 dB, and the device length is reduced by 500μm after the input and output arms are also respectively increased by inverted taper structure. The improved device has superiority The devices are designed with fluorine-doped polymer materials optimized to maximize the output light intensity by deviating from the output waveguide position within a reasonable range.