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论述了等离子体的常用诊断方法,指出光谱测量法是高气压微放电等离子体诊断的最佳方法,详细评述了吸收光谱法与发射光谱法。最后还给出了微放电等离子体参数的近似估计方法。通过这些方面的研究,能够获得高气压微放电等离子体的详细特性,为高气压微放电等离子体在工业上的应用提供依据。
The common diagnostic methods of plasma are discussed. It is pointed out that spectrometry is the best method for the diagnosis of high pressure micro-discharge plasma. The absorption spectroscopy and emission spectrometry are reviewed in detail. Finally, an approximate method of estimating the parameters of micro-discharge plasma is also given. Through these researches, we can obtain the detailed characteristics of high pressure micro-discharge plasma and provide the basis for the industrial application of high pressure micro-discharge plasma.