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高面形精度非球面加工,离不开面形测量和误差补偿加工。离线测量容易导致工件装夹误差,并带来非加工时间增加。为解决这一问题,采用一种利用接触式的微小测头与激光干涉位移测量计相结合的在位形状测量装置,直接对磨削后的工件表面进行在位形状误差测量。介绍了该在位测量方法的原理及非球面测量过程,探讨了回转对称轴在半径方向的误差与测头倾角误差对测量误差的影响,并进行了补偿加工实验。对加工后的微小非球面进行了在位测量,并与超精密离线测量系统测量结果进行了比较。
High-profile precision aspheric processing, inseparable from the shape measurement and error compensation processing. Off-line measurement easily lead to workpiece clamping error, and bring non-processing time increases. In order to solve this problem, an in-position shape measurement device using a contact-type micro-probe and a laser interferometer-displacement meter is used to directly measure the in-position shape error of the polished workpiece surface. The principle of the in-situ measurement method and the aspheric measurement process are introduced. The influence of the error of the rotary axis of symmetry in the radial direction and the tilt error of the probe on the measurement error is discussed, and the compensation machining experiment is carried out. In-position measurements of the machined, tiny aspheric surfaces were made and compared to those of the ultra-precision off-line measurement system.