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为了提高辊筒模具光学微结构的加工精度,本文对辊筒模具超精密加工机床的直线导轨系统进行了热变形分析。首先,根据液体静压导轨的结构特点提出了有限元分析中的油膜等效替代方法,建立了有限元分析模型。其次,应用有限元软件对机床直线导轨系统进行了热-结构耦合分析,得到了其直线导轨系统热变形误差,并给出了改善辊筒模具加工机床光学微结构加工精度的方法。最后,通过微结构刨削加工实验对有限元分析结果进行了验证。
In order to improve the machining precision of the optical microstructure of the roller mold, this paper analyzes the thermal deformation of the linear guide system of the roller mold ultra-precision machining machine. First of all, according to the structural characteristics of hydrostatic guide rail, the equivalent method of oil film in finite element analysis is proposed and the finite element analysis model is established. Secondly, the finite element software is used to analyze the thermal-structural coupling of the linear guide system of the machine tool, the thermal deformation error of the linear guide system is obtained, and the method to improve the machining precision of the optical microstructure of the machine tool is given. Finally, the results of finite element analysis were verified by microstructure planing experiments.