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本文利用数值计算的方法,研究比较了目前常用的四种解析解设计的短程透镜凹坑深度方向加工误差对其聚焦效果的影响,得到了该方向加工误差与其焦距改变量之间的定量关系.结果表明:这四种解析解设计的短程透镜凹坑深度相对加工误差△Zo/Zo与焦距的相对改变量△b/b的比值为一常数.根据这一关系给出了几种典型集成光学器件中短程透镜的加工容限误差.上述研究可为高分辨率光学器件的设计、制作提供理论支持和指导.
In this paper, numerical methods are used to study the effect of the processing error of the depth direction of the short-range lens on the focusing effect of the four commonly used analytical solutions. The quantitative relationship between the processing error and the change of the focal length is obtained. The results show that the ratio of △ Zo / Zo to the relative change of focal length △ b / b of the short-distance lens pit of the four kinds of analytical solutions is a constant. According to this relationship, several typical integrated optics The error of the processing tolerance of the short-range lens in the device.The above research can provide theoretical support and guidance for the design and fabrication of high-resolution optical devices.