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介绍了基于介质阻挡放电的准分子紫外辐射光源的特性,以及准分子紫外光源的优点;分析了国内外有关Xe Cl与Xe Br准分子紫外光源的最新研究进展,总结了Xe Cl与Xe Br准分子紫外光源辐射特性的研究方法,了解了气压、气体的组成、温度以及电源的频率和电压对辐射功率和辐射效率的影响,为优化XeCl与XeBr准分子紫外灯奠定了基础。
The characteristics of excimer UV radiation source based on dielectric barrier discharge and the advantages of excimer UV light source are introduced. The latest research progress of Xe Cl and Xe Br excimer UV light sources both at home and abroad is analyzed. Xe Cl and Xe Br Molecular radiation of ultraviolet light source research methods to understand the pressure, gas composition, temperature and power frequency and voltage on the radiation power and radiation efficiency, to optimize XeCl and XeBr excimer UV lamp laid the foundation.