利用ＸｅＣｌ（３０８ｎｍ）脉冲准分子激光淀积技术在功率密度５×１０８Ｗ／ｃｍ２、室温、真空度１０－３Ｐａ的条件下，制备出不含氢成分的类金刚石薄膜，研究了类金刚石薄膜的特性及其随制备工艺条件的变化规律。研究了激光诱导的碳等离子体发射光谱，探讨了类金刚石薄膜的形成机理。 Dc-free diamond-like carbon films were prepared by XeCl (308nm) pulsed excimer laser deposition at a power density of 5 × 10 8 W / cm 2, a room temperature and a vacuum degree of 10 -3 Pa. The properties of diamond-like carbon films And its variation with the preparation process conditions. The laser-induced carbon plasma emission spectra were studied, and the formation mechanism of diamond-like carbon films was discussed.