论文部分内容阅读
In this study, high-entropy films with the compo-sition of NbTiAlSiNX were prepared by a reactive direct current (DC) magnetron sputtering technique, with different nitrogen flow rates (0, 4 and 8 ml·min-1). The microstruc-tures and properties were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), high-resolution transmission electron microscopy (HRTEM), nano-indenter and spectrophotometer. All of the as-deposited NbTiAlSiNX films are shown to have an amorphous structure, and the films exhibit high thermal stability up to 700 °C. The maximum hardness and modulus values of the films reach 20.5 GPa (4 ml·min-1) and 206.8 GPa (0 ml·min-1), respectively. The films exhibit high absorption of the solar energy in the wavelength of 0.3–2.5 μm, which indicates that NbTiAlSiNX nitride film is a potential candidate solar selective absorbing coating for high-temperature photo-thermal conversion in the concentrated solar power project.