The progress of a microbeam facility in the Institute of Plasma Physics was discussed in this paper. This kind of equipment can supply single-particle beam which may be implanted into cells in micrometer-radius and measured by a new outstanding detector among global microbeam systems. Measurements by some plain targets showed that the highest current after the accelerator tube can be larger than 20μA, the H2+ current before the second bending magnet is near 0.9μA, the current after the second bending magnet is near 0.8μA, and the current of the beam line (after a 2-mm diameter aperture) is near 0.25 nA which is enough for the single-particle microbeam experiment. It took scientists 3 months to do their microbeam experiment after setting up the accelerator beam line and get the microbeam from this equipment. Two pre-collimators were installed between the 2-mm diameter aperture and the collimator to survey the beam. Tracks on the CR39 film etched in the solution of NaOH showed that the beam can go through the collimator including a 10μm diameter aperture and the 3.5μm thick vacuum sealing film (Mylar). A new method, which is called optimization of the beam quality, was put forward in this paper, in order to get smaller diameter of beam-spot in microbeam system.