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本文设计了一种口径为φ200毫米的可换式抽气面结构的致冷机低温泵,粘有吸附剂的抽气板用可拆紧固件固定,具有易装和更换的优越性,其冷阵结构使非凝性气体易流向吸附剂材料。作者分析了冷阵结构与低温泵抽气性能的关系,并用Oatley—MonteCarlo方法对一、二级冷阵结构参数进行了优化,使该泵抽气效率的设计计算值达到了较高水平,对 N2为0.40, H2为0.225,尤其对 H2,远远超过了国外同口径致冷机低温泵的最高指标(0.15)。
In this paper, a cryogenic pump with exchangeable suction structure with a diameter of φ200 mm was designed. The suction plate with adsorbent was fixed with removable fasteners, which has the advantages of easy installation and replacement. The cold array structure allows non-condensable gases to flow easily to the adsorbent material. The author analyzes the relationship between the cooling array structure and the pumping performance of the cryogenic pump, and optimizes the structural parameters of the first and second stage cold arrays by the Oatley-Monte Carlo method, which achieves a high level of design and calculation of the pumping efficiency. N2 is 0.40, H2 is 0.225, especially for H2, which far exceeds the highest level (0.15) of cryogenic pump of the same caliber in foreign countries.