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利用化学沥滤技术,分析了亚表面裂纹对基底表面和减反射膜激光损伤阈值(LIDT)的影响。通过去除或保留研磨裂纹,获得了亚表面裂纹数密度有明显区别的两类基底。为了凸出亚表面裂纹层的作用,基底采用化学沥滤去除另外一种可能的影响因素,即再沉积层中的抛光杂质。然后采用电子束蒸发镀制HfO2/SiO2减反射膜。355nm激光损伤阈值测试结果和损伤形貌分析证实了基底亚表面裂纹对减反射膜抗激光损伤能力的负面影响。根据熔石英基底抛光表面的烘烤现象,提出了亚表面缺陷影响膜层激光损伤的耦合模型。
The effects of subsurface cracks on the laser damage threshold (LIDT) of the substrate surface and antireflection coatings were analyzed using chemical leaching techniques. By removing or retaining the grinding cracks, two types of substrates were obtained, which clearly distinguished the number density of sub-surface cracks. In order to highlight the role of sub-surface crack layer, the substrate using chemical leaching to remove another possible influencing factors, namely the redeposition of the polishing impurities in the layer. HfO2 / SiO2 antireflection coating was then deposited by electron beam evaporation. 355nm laser damage threshold test results and damage morphology analysis confirmed the sub-surface substrate anti-reflective film anti-laser damage the ability of the negative impact. According to the phenomenon of bake on the polished surface of fused quartz substrate, a coupled model of the laser induced damage of the sub-surface defects is proposed.