通过建立二维数值分析模型,分析了不同进气温度及压力时,带电纳米粒子在激波和电场力耦合作用下的加速特性以及对粒子撞击基板速度的影响。结果表明:弓形激波气体压缩层是造成纳米粒子减速的主要因素,弓形激波气体压缩层越薄粒子撞击基板时速度越大;外加电场时,带电纳米粒子撞击基板的速度得到较大提升。 Through the establishment of two-dimensional numerical analysis model, the accelerating properties of charged nanoparticles under shock and electric field forces and the impact on particle velocity were analyzed under different inlet temperatures and pressures. The results show that the compressive layer of the arcuate shock wave is the main factor that causes the slowdown of the nanoparticles. The thinner the compressive layer of the arcuate shock wave, the faster the particle collides with the substrate. When the applied electric field is applied, the charged nano-particles collide with the substrate and increase greatly.