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针对电磁兼容材料高屏效和高透光相互制约的技术难题,本文设计了以ITO/Ag为周期的光子晶体膜。本文着重分析了制备工艺对其屏蔽效能、透光率和导电性能的影响。研究结果表明,随着氧氩比的增加,透光率和导电性提高,屏蔽效能相应降低。而在无氧的条件下沉积Ag膜,可避免在高频下屏蔽效能的降低。随着沉积温度的提高,金属Ag膜变粗糙,屏蔽效能和透光率明显降低。通过对室温沉积光子晶体膜进行高温退火,光子晶体膜的结晶度、透光率和屏蔽效能都相应提高。这种光子晶体具有高屏效和高透光的双重性能,在电磁屏蔽可视领域具有较好的应用前景。
Aiming at the technical problems of high-efficiency and high-light-transmission of electromagnetic compatibility materials, a photonic crystal film with ITO / Ag cycle is designed in this paper. This article focuses on the analysis of the preparation of its shielding efficiency, light transmittance and conductivity. The results show that with the increase of oxygen to argon ratio, the transmittance and conductivity increase, and the shielding effectiveness decreases accordingly. However, the deposition of Ag film under anaerobic conditions can prevent the reduction of shielding effectiveness at high frequencies. With the increase of deposition temperature, the metal Ag film becomes rough, and the shielding efficiency and light transmittance are significantly reduced. Through the high-temperature annealing of the photonic crystal film deposited at room temperature, the crystallinity, light transmittance and shielding efficiency of the photonic crystal film are correspondingly improved. This kind of photonic crystal has the dual performance of high screen efficiency and high light transmission, and has good application prospect in the field of electromagnetic shielding visualization.