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用真空蒸发方法成功地制备了自支撑 Ｃａ 靶。在充 Ａｒ 气手套箱中剥离靶膜。基片的选择、材料的清洗、快速操作和 Ａｒ 气保护是制靶的关键。
Self-supporting Ca targets were successfully prepared by vacuum evaporation. Peel the target membrane in an Ar-filled glove box. Substrate selection, material cleaning, rapid operation and Ar gas protection are key to target formation.