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以正硅酸乙酯(TEOS)为源物质,空气为载气和稀释气,采用常压化学气相沉积法(APCVD)在HP40钢表面制备了SiO2涂层.采用光学显微镜、扫描电子显微镜、能量色散能谱仪、DMAX-C型X射线衍射仪、显微硬度仪等,研究了SiO2涂层的组织结构、表面形貌、物相组成和显微硬度;并用热震实验法和剥离实验法研究了涂层与HP40基体的结合强度.结果表明,所制备的SiO2涂层厚度约为1μm,由细小颗粒组成,颗粒比较均匀、大部分颗粒的粒径均在1μm以下;涂层无明显孔隙,与基体的结合强度较高;其显微硬度明显高于HP40基体.
SiO 2 coating was prepared on the surface of HP40 steel by atmospheric pressure chemical vapor deposition (APCVD) using tetraethylorthosilicate (TEOS) as the source material and air as the carrier gas and diluent gas.Using optical microscope, scanning electron microscopy, energy Dispersive spectrometer, D MAX-C X-ray diffractometer and microhardness tester were used to study the microstructure, surface morphology, phase composition and microhardness of SiO2 coating. Peel experiment method was used to study the bonding strength between the coating and HP40 matrix.The results showed that the thickness of SiO2 coating was about 1μm and consisted of fine particles with a uniform particle size and the particle size of most particles was under 1μm. No obvious pores, with a higher bond strength of the substrate; its microhardness was significantly higher than the HP40 matrix.