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在微力微位移装置中采用闭环控制压电作动器实现微位移进给和微力加载 ,设计了加载机构 ,建立加载机构的压电作动器输入电压、加载装置输出位移和输出力之间的关系。通过电容测位移仪检测输出位移 ,实验得到加载系统刚度 ,根据压电作动器输入电压、加载装置刚度 ,计算出加载力大小。该方法为微机械力学性能测试仪打下了基础
In the micro-force displacement device, a closed-loop controlled piezoelectric actuator is used to realize micro-displacement feed and micro-force loading. A loading mechanism is designed to establish the input voltage of the piezoelectric actuator of the loading mechanism, and the output displacement and output force of the loading device relationship. The output displacement was measured by capacitance displacement meter. The stiffness of the loaded system was obtained experimentally. Based on the input voltage of the piezoelectric actuator and the stiffness of the loading device, the loading force was calculated. The method laid the foundation for the micromechanical performance tester