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用磁控溅射法在玻璃衬底上制备了掺铝氧化锌(AZO)薄膜,然后用脉冲式快速光热处火(PRTP)法对样品进行了600 ～800℃的退火处理。采用X射线衍射仪(XRD)、分光光度计、四探针等测试手段对AZO薄膜的结晶性能、透光率和导电性能进行了表征。结果表明:(1)薄膜退火后透光率基本维持在退火前(82 ～92%)的水平,而电阻率则由10-4Ω.cm上升了1到6个数量级,已丧失了“导电膜”意义;(2)样品具有好的结构性能有利于提高样品的导电性能。对此现象进行了理论分析。
AZO films were prepared on glass substrates by magnetron sputtering. Then the samples were annealed at 600 ~ 800 ℃ by pulsed rapid photothermolysis (PRTP) method. The crystallinity, optical transmittance and electrical conductivity of AZO thin films were characterized by X-ray diffraction (XRD), spectrophotometer and four probes. The results show that: (1) After the film annealing, the light transmittance basically maintained at the level of 82-92% before annealing, while the resistivity increased by 1 to 6 orders of magnitude from 10-4Ω.cm, Membrane "meaning; (2) the sample has good structural properties conducive to improving the conductivity of the sample. This phenomenon has been theoretically analyzed.