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目的:采用聚焦离子束(FIB)场发射扫描双束电镜检测硅化镀膜注射剂玻璃瓶的膜层厚度,考察膜层的稳定性和均一性。方法:选择中硼硅玻璃管制硅化镀膜注射剂瓶作为试验样品,通过超声清洗、耐高温、耐热性、耐水性、耐酸性、耐碱性等稳定性试验处理后,利用FIB场发射扫描双束电镜的离子束,对玻璃瓶的硅化膜层进行垂直切割,利用扫描电镜的内置测量模块对切割面的硅化层厚度进行测量。结果:中硼硅玻璃管制硅化镀膜注射剂瓶的硅化膜层厚度稳定性和均匀性较好。结论:FIB场发射扫描双束电镜能够准确地检测玻璃硅化瓶的膜层厚度,并能直接客观地反映出硅化瓶的膜层稳定性和均一性。
OBJECTIVE: To investigate the stability and homogeneity of the coating by means of focused ion beam (FIB) field emission scanning dual-beam electron microscopy to examine the film thickness of the silicified coating injection vial. Methods: Borosilicate glass tube siliconized injection vials were selected as test samples. After ultrasonic cleaning, high temperature resistance, heat resistance, water resistance, acid resistance, alkali resistance and other stability tests, Electron microscopy of the ion beam, the silicagel film of glass bottles cut vertically, the use of scanning electron microscopy of the built-in measuring module on the cut surface silicide layer thickness measurement. Results: The thickness and the uniformity of the silicidation film thickness of borosilicate glass tube coated injection vials were better. Conclusion: FIB field emission scanning dual-beam electron microscopy can accurately detect the thickness of the glass bottle, and can directly and objectively reflect the stability and uniformity of the membrane of the siliconized bottle.