电弧等离子体的单波长激光平晶干涉诊断

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本文根据等离子体物理学及光学有关原理,推导出电弧内任意一点的温度与该点局部条纹移动数的关系式,利用此式与电弧等离子体的物理方程组成解调方程组,来解决单波长激光干涉法诊断电弧等离子体的解调问题。应用此法诊断了氩弧,测出其温度场和电子、离子及原子的密度分布,并对结果进行了验征。 Based on the principles of plasma physics and optics, this paper deduces the relationship between the temperature at any point in the arc and the number of local fringe movement at this point. By using this equation and the physical equations of the arc plasma, a demodulation equation is formed to solve the problem of single wavelength Laser interferometry diagnoses the problem of arc plasma demodulation. The argon arc was diagnosed by this method. The temperature distribution and the density distribution of electrons, ions and atoms were measured and the results were tested.
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本文介绍新近研制成功的作为电子束曝光用的激光定位干涉系统.文章介绍了光学系统,光路计算结果,并阐述了利用检偏器调节干涉条纹相位的新方法,其定位精度为±0.04μm. In t