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介绍了计算机模拟技术在微传感器和微执行器设计中的应用 ,通过对多晶硅压力传感器和微泵膜片的计算机模拟分析 ,优化了器件的结构设计。研究工作表明计算机模拟是微传感器和微执行器设计的有效工具
The application of computer simulation technology in the design of micro-sensors and micro-actuators is introduced. Through the computer simulation analysis of polysilicon pressure sensor and micro-pump diaphragm, the structural design of the device is optimized. Research shows that computer simulation is an effective tool for micro-sensor and micro-actuator design